The first day of the conference was an exciting one for me. I was honored and humbled to become the 6th winner of the Frits Zernike Award for Microlithography. I\u2019ll have more to say about this later, but there is no doubt that this moment was one of the highlights of my career.<\/p>\n
The plenary talks were exceptional this year, especially the last two. Here are some of my favorite phrases and quotes:<\/p>\n
Lisa Su, Freescale: \u201cLithography-induced complexity\u201d<\/p>\n
Gilad Almogy, Applied Materials: \u201c2009 will likely be the worst year ever for our industry.\u201d <\/p>\n
Bernie Meyerson, IBM: \u201cWhere have all the GHz gone?\u201d
\n\u201cAtoms don\u2019t scale.\u201d
\n\u201cScaling is dead. Moore\u2019s Law isn\u2019t.\u201d
\nThe Albany EUV alpha-demo tool \u201clooks like you rolled an electromagnet through an automotive junkyard.\u201d<\/p>\n
When the conference sessions began, I attended the resist conference. It was great to witness the presentation of the first Jeff Byers Best Poster Award. I am extremely gratified to see Jeff\u2019s memory honored in this way, though I\u2019m sure Jeff would have shook his head in disbelief at the mere thought of such a thing! Thanks to the resist conference organizers for creating this wonderful award. At the end of the first session, just before lunch, Cliff Henderson inserted into his talk a 70th birthday recognition for Grant Willson, including beautiful collage picture of Grant and ending with a rousingly off-key rendition of the Happy Birthday song. Congratulations Grant! It\u2019s fun to see you embarrassed.<\/p>\n
The afternoon papers did not generate much excitement for me, and I guess I am so used to it now that I didn\u2019t even get riled up when I saw the graphs with no numbers on the axes or the study that compared \u201cmaterial A\u201d to \u201cmaterial B\u201d and found, amazingly, that material A was better.<\/p>\n
In the evening, I stood by my two posters for two and a half hours \u2013 tiring but fun. The good thing about the low attendance is that the poster session was actually manageable this year \u2013 the crowds were not so great and one could easily navigate through the isles and see the posters. Not that I did. The disadvantage of giving a poster is that you don\u2019t get to see any of the others. Still, I had many great discussions with people who came by.<\/p>\n
The day ended with dinner (and beer) at Gordon Biersch. A day in heaven for a lithographer.<\/p>\n","protected":false},"excerpt":{"rendered":"
The first day of the conference was an exciting one for me. I was honored and humbled to become the 6th winner of the Frits Zernike Award for Microlithography. I\u2019ll have more to say about this later, but there is no doubt that this moment was one of the highlights of my career. The plenary […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-145","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/145","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=145"}],"version-history":[{"count":0,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/145\/revisions"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=145"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=145"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=145"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}