Midweek in the conference the adrenaline of the first few days begins to wear off. Combine that with a few nights in a row with less sleep than desired and all of a sudden sitting through six papers in a row starts to seem like work. I focused on all things LER on Wednesday, trying to find the Resist Conference papers that weren\u2019t so packed with chicken-wire diagrams and 100-letter chemical names that mere mortals might be able to understand them. I think I\u2019m making the same comment as last year: I\u2019m amazed at how slow our progress is at understanding the fundamental mechanisms of line-edge roughness. There is a good chance that LER will be the ultimate limiter of lithographic resolution \u2013 why isn\u2019t the industry putting more effort into the science of it?<\/p>\n
In the Optical Lithography session, John Petersen\u2019s talk on interference lithography (a topic I have worked on in the past) was well received. I agree with Bruce Smith\u2019s comment: this technology has been too long neglected.<\/p>\n
In the evening I skipped the DfM or MfD or f-in MD or whatever it was called panel and went straight for the hospitality suites (which were more plentiful than the previous night). The Hitachi party included a routine by the stand-up comedian Don McMillan (the power-point comedian and former chip designer). He was extremely funny, as always, and the sake was excellent. Thanks to Hitachi for being such a good host.<\/p>\n","protected":false},"excerpt":{"rendered":"
Midweek in the conference the adrenaline of the first few days begins to wear off. Combine that with a few nights in a row with less sleep than desired and all of a sudden sitting through six papers in a row starts to seem like work. I focused on all things LER on Wednesday, trying […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-147","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/147","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=147"}],"version-history":[{"count":0,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/147\/revisions"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=147"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=147"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=147"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}