{"id":152,"date":"2009-06-26T13:45:41","date_gmt":"2009-06-26T18:45:41","guid":{"rendered":""},"modified":"2014-05-21T14:36:57","modified_gmt":"2014-05-21T19:36:57","slug":"hiroshi-ito","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=152","title":{"rendered":"Hiroshi Ito"},"content":{"rendered":"<p><img loading=\"lazy\" decoding=\"async\" src=\"\/wp-content\/uploads\/20090626-Hiroshi-Ito.jpg\" style=\"float:left;margin:0 1em 1em 0;\" width=\"135\" height=\"158\" title=\"null\" alt=\"null\" \/><\/p>\n<div class=\"leftbox\"><\/div>\n<p>Last week Hiroshi Ito, co-inventor of the chemically amplified resist (along with C. Grant Willson and Jean Fr\u00e9chet), passed away after a long illness.  Dr. Ito was working as a post-doc under Grant Willson at IBM when they developed the concept and the first example of a <a href=\"http:\/\/www.chemicalheritage.org\/pubs\/magazine\/feature_photoresists_p1.html\">chemically amplified photoresist<\/a> in 1980, now the dominant technology for semiconductor manufacturing.  Dr. Ito became an IBM fellow in 2008.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Last week Hiroshi Ito, co-inventor of the chemically amplified resist (along with C. Grant Willson and Jean Fr\u00e9chet), passed away after a long illness. Dr. Ito was working as a post-doc under Grant Willson at IBM when they developed the concept and the first example of a chemically amplified photoresist in 1980, now the dominant [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-152","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/152","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=152"}],"version-history":[{"count":2,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/152\/revisions"}],"predecessor-version":[{"id":350,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/152\/revisions\/350"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=152"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=152"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=152"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}