Sunday was a beautiful day in San Jose, bright and sunny.\u00a0 Just a few blocks away, though, last week\u2019s flooding has devastated whole neighborhoods, causing possibly billions of dollars in damage and the evacuation of more than 10,000 people.\u00a0 Though very close, that disaster seems far away as we begin the SPIE Advanced Lithography Symposium and shift our focus from what nature can do to us to what we can do to harness nature.<\/p>\n
Attendance is again at about 2,200 people this year, similar to what it has been for the last eight years.\u00a0 It\u2019s hard to get a full sense of what this week will teach us, but just a cursory glance at the program reveals same major shifts in emphasis in the lithography world.\u00a0 The Advanced Lithography Technologies conference, now renamed Emerging Pattern Technologies, has shrunk considerably over the last two years, from 71 orals and 27 posters in 2015, to 27 orals and 14 posters this year.\u00a0 There are far fewer papers on DSA (directed self-assembly) this year, as well as fewer multibeam e-beam lithography and nanoimprint lithography papers.\u00a0 DSA\u2019s early promise of \u201cresolution in a bottle\u201d has given way to the hard reality of defectivity for a thermodynamically driven system.\u00a0 Meanwhile, the EUV community is emphasizing their progress towards manufacturing readiness.\u00a0 Some hard realities await them as well, though, and talks on line-edge roughness seem to be everywhere.<\/p>\n
This gives me the opportunity to advertise my first talk, at 5:40pm on Monday, at the end of the first day of the EUV conference.\u00a0 I have been invited to give a 40 minute tutorial talk on stochastic-induced roughness.\u00a0 I believe this is the first time that we\u2019ve had a tutorial talk at the Advanced Lithography symposium, and I am very excited to be giving it.\u00a0 I hope everyone interested in line-edge roughness will endure the late hour and come and listen.<\/p>\n
For those who are interested in the talk but can\u2019t be at the Symposium, I\u2019m excited about SPIE\u2019s new program to capture each presentation on video.\u00a0 SPIE will be filming the slides and recording the audio for each talk.\u00a0 For presenters who have given SPIE permission, these talks will then be posted on the SPIE Digital Library as a permanent record of the presentation.\u00a0 So, if you do miss my tutorial talk, look for it to show up in a few weeks on the Digital Library.<\/p>\n
Let the Symposium begin!<\/p>\n","protected":false},"excerpt":{"rendered":"
Sunday was a beautiful day in San Jose, bright and sunny.\u00a0 Just a few blocks away, though, last week\u2019s flooding has devastated whole neighborhoods, causing possibly billions of dollars in damage and the evacuation of more than 10,000 people.\u00a0 Though very close, that disaster seems far away as we begin the SPIE Advanced Lithography Symposium […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-514","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/514","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=514"}],"version-history":[{"count":1,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/514\/revisions"}],"predecessor-version":[{"id":515,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/514\/revisions\/515"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=514"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=514"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=514"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}