{"id":552,"date":"2018-02-25T08:09:15","date_gmt":"2018-02-25T14:09:15","guid":{"rendered":"http:\/\/life.lithoguru.com\/?p=552"},"modified":"2018-02-25T08:09:15","modified_gmt":"2018-02-25T14:09:15","slug":"spie-advanced-lithography-symposium-2018-a-prologue","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=552","title":{"rendered":"SPIE Advanced Lithography Symposium 2018 \u2013 a prologue"},"content":{"rendered":"<p><span style=\"color: #000000; font-family: Calibri;\">Just over one year ago I launched, with Ed Charrier, our new company, Fractilia.\u00a0 After inventing a new concept for detecting edges in a noisy SEM image, we released last July the first version of our flagship product, MetroLER, for measuring the roughness of line\/space patterns.\u00a0 Last week we released a second version of MetroLER, including the measurement of contact holes.\u00a0 It has been a very busy year.\u00a0 Alas, I have had the give up my title as Gentleman Scientist \u2013 I have a real job now!<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">But old habits die hard, and the mindset of the Gentleman Scientist is not easily revoked.\u00a0 As we approach this years\u2019 SPIE Advanced Lithography Symposium, I will attempt to wear two hats (and titles).\u00a0 As CTO of a start-up, I will be meeting with customers, giving papers showing results from our product, and evangelizing about the right way to measure pattern roughness and stochastic effects in lithography.\u00a0 But as a lingering Gentleman Scientist I will also try to appraise the state of lithography in our industry.\u00a0 I\u2019ll watch a small subset of the many presentations given over the next week and let you know in these posts what I think.\u00a0 I\u2019ll see old friends, have interesting hallway conversations, and drink too much every night.\u00a0 As always, I will learn a tremendous amount and have a great time doing it.<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">I\u2019ll also experience a fair amount of cognitive dissonance as this skeptic of EUV lithography works hard to make EUV lithography a success.\u00a0 If EUV lithography cannot attain long-term commercial viability I don\u2019t want it to be due to poor pattern roughness measurement!\u00a0 Like everyone else, I\u2019m looking forward to hearing about all the latest developments in EUV, but also in the many other subjects that bring us lithographers together.<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">So look out San Jose, here come the lithographers!<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Just over one year ago I launched, with Ed Charrier, our new company, Fractilia.\u00a0 After inventing a new concept for detecting edges in a noisy SEM image, we released last July the first version of our flagship product, MetroLER, for measuring the roughness of line\/space patterns.\u00a0 Last week we released a second version of MetroLER, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-552","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/552","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=552"}],"version-history":[{"count":1,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/552\/revisions"}],"predecessor-version":[{"id":553,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/552\/revisions\/553"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=552"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=552"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=552"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}