{"id":554,"date":"2018-02-26T07:12:36","date_gmt":"2018-02-26T13:12:36","guid":{"rendered":"http:\/\/life.lithoguru.com\/?p=554"},"modified":"2018-02-26T07:12:36","modified_gmt":"2018-02-26T13:12:36","slug":"spie-advanced-lithography-symposium-2018-day-0","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=554","title":{"rendered":"SPIE Advanced Lithography Symposium 2018 \u2013 day 0"},"content":{"rendered":"<p><span style=\"color: #000000; font-family: Calibri;\">Sunday is, for most attendees of the Advanced Lithography Symposium, a travel day to get to San Jose, or just a normal Sunday for those who are local.\u00a0 But it is technically the Symposium\u2019s first day.\u00a0 For me it was a 14 hour day, beginning with teaching an all-day short course (with John Petersen), giving two talks at different company-sponsored workshops, and ending with a planning dinner for next year\u2019s conference.\u00a0 Let\u2019s just say I\u2019m all warmed up and ready for the papers to begin!<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">2018 will be a very important year in the development of EUV lithography towards high-volume manufacturing (HVM).\u00a0 (I\u2019m pretty sure I say this every year.)\u00a0 ASML now says that it\u2019s NXE:3400 will be the tool that is capable of HVM, and the first 3400 was shipped and installed at Samsung the end of last year.\u00a0 Will we see some early results from this tool?\u00a0 I\u2019m not holding my breath.<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">Attendance this year will be similar to that of the last 10 years, in the 2000-2200 range.\u00a0 But abstract submittals were down 11% from last year.\u00a0 That disconnect (still strong attendance but reduced author participation) is probably a result of the continuing industry consolidation.\u00a0 In particular, the semiconductor makers are shrinking to a \u201cbig three\u201d plus a few others.\u00a0 But the real problem is that the big three are not pulling their weight as authors.\u00a0 Intel is giving exactly zero papers at the symposium this year.\u00a0 Zero. TSMC is the primary author on three papers.\u00a0 Samsung is primary author on 10 papers (getting more respectable).\u00a0 Filling the void left by the big three are GlobalFoundries (with nearly 40 papers) and imec (I didn\u2019t even try to count). \u00a0It\u2019s time for Intel and TSMC to step up and become more enlightened: contributing to the advancement of the lithography community as a whole is good for the whole industry, including them.<\/span><\/p>\n<p><span style=\"color: #000000; font-family: Calibri;\">OK, I\u2019ve had my first rant.\u00a0 I guess that means the conference has officially begun.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Sunday is, for most attendees of the Advanced Lithography Symposium, a travel day to get to San Jose, or just a normal Sunday for those who are local.\u00a0 But it is technically the Symposium\u2019s first day.\u00a0 For me it was a 14 hour day, beginning with teaching an all-day short course (with John Petersen), giving [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-554","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/554","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=554"}],"version-history":[{"count":1,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/554\/revisions"}],"predecessor-version":[{"id":555,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/554\/revisions\/555"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=554"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=554"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=554"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}