Thursday, the final day of the conference, is\nalways full of mixed emotions. I\u2019m\nexhausted and glad the end is coming since I don\u2019t think I can absorb anything\nelse and need time to process all that I have seen and heard. But like a sugar rush that turns into a sugar\ncrash, when the last paper is over and the halls start emptying out, I feel\nalmost depressed. The energy and pace of\nthe week is entirely unsustainable, but it is intoxicating.<\/p>\n\n\n\n
In the morning I saw another good paper by\nBertrand Le-Gratiet of STMicro, this time on the uses of contour-based\nmetrology. Both of his talks were\nperfect illustrations of the power of the visual representation of data. Sufficiently complex data sets can contain\nmany important lessons, but pulling out the new and useful information from the\nbackground of the known and expected can be difficult. The right graph or presentation of the data\ncan make the important points excessively clear. I also liked two imec papers showing PSD\nanalysis of AFM data. By running an AFM\ntip in a 1D stripe along the top of a photoresist line we can get important\ninformation not available in a top-down SEM image. PSD analysis of the data proved a very useful\nrepresentation of that top surface roughness.<\/p>\n\n\n\n
I spent the entire afternoon in the Grant\nWillson Tribute Session. On the occasion\nof Grant\u2019s retirement, the Patterning Materials conference devoted three hours\nto honoring the most famous and most beloved resist chemist in the world. The talks walked us through Grant\u2019s career\nwith heartwarming stories of how he has profoundly changed each of us. Here is the list of speakers, covering many\n(but not all) of the important phases of Grant\u2019s life in science and\nengineering:<\/p>\n\n\n\n
Bob Allen (IBM Almaden)
\nYan Borodovsky (retired from Intel)
\nRalph Dammel (EMD)
\nCliff Henderson (Univ. of South Florida)
\nChris Mack (Fractilia)
\nDave Medeiros (Globalfoundries)
\nDoug Resnick (Canon)
\nMark Somervell (Tokyo Electron)<\/p>\n\n\n\n
As almost every speaker emphasized, Grant\u2019s\nmassively important technical accomplishments are dwarfed by the personal\ninfluences he has had on so many people, but especially the 274 (+1) students\nthat have graduated from his University of Texas research group. This tribute was definitely the highlight of\nthe week for me, with the love for Grant pouring out from each speaker, and\npalpably present throughout the room. We\nwill miss you, Grant. (But not me, since\nI live in Austin and hope to continue seeing Grant just as often as before!)<\/p>\n","protected":false},"excerpt":{"rendered":"
Thursday, the final day of the conference, is always full of mixed emotions. I\u2019m exhausted and glad the end is coming since I don\u2019t think I can absorb anything else and need time to process all that I have seen and heard. But like a sugar rush that turns into a sugar crash, when the […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-588","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/588","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=588"}],"version-history":[{"count":1,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/588\/revisions"}],"predecessor-version":[{"id":589,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/588\/revisions\/589"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=588"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=588"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=588"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}