{"id":62,"date":"2007-03-01T10:48:38","date_gmt":"2007-03-01T16:48:38","guid":{"rendered":""},"modified":"-0001-11-30T00:00:00","modified_gmt":"-0001-11-30T05:00:00","slug":"","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=62","title":{"rendered":"SPIE AL07 \u2013 Day 3 (Wednesday)"},"content":{"rendered":"<p>So, what\u2019s the minimum pitch found on a 45 nm half-pitch process?<\/p>\n<p>No, it\u2019s not a trick question.  And yet, surprisingly, the answer is not necessarily obvious.  I\u2019ve talked to a few people and it seems that the phrase \u201cXX nm half-pitch\u201d is becoming a name, not a numerical description.  We\u2019ve known for years that node names, once themselves descriptive of the minimum half-pitch of the chip, are now the sole purview of marketing departments and can mean just about anything.  That\u2019s why people began to specify minimum half-pitch.  \u201cHere are the results from our 32 nm node process, which has a 45 nm half-pitch \u2026\u201d  But if a company quotes the half-pitch to describe a process, what happens if that company decides to relax the minimum pitch due to lithography challenges?  The easy solution is to relax the pitch without changing the name you\u2019ve given to that process.  We are starting to see \u201c45 nm half-pitch\u201d processes with a metal 1 (minimum) pitch of 100 or 105 nm.  We in this business are nothing if not innovative.<\/p>\n<p>This is a short blog today.  Too many hospitality suites last night.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>So, what\u2019s the minimum pitch found on a 45 nm half-pitch process? No, it\u2019s not a trick question. And yet, surprisingly, the answer is not necessarily obvious. I\u2019ve talked to a few people and it seems that the phrase \u201cXX nm half-pitch\u201d is becoming a name, not a numerical description. We\u2019ve known for years that [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-62","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/62","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=62"}],"version-history":[{"count":0,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/62\/revisions"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=62"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=62"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=62"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}