{"id":669,"date":"2022-04-27T07:12:02","date_gmt":"2022-04-27T12:12:02","guid":{"rendered":"http:\/\/life.lithoguru.com\/?p=669"},"modified":"2022-04-27T07:12:02","modified_gmt":"2022-04-27T12:12:02","slug":"spie-advanced-lithography-and-patterning-symposium-2022-day-2","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=669","title":{"rendered":"SPIE Advanced Lithography and Patterning Symposium 2022 \u2013 day 2"},"content":{"rendered":"\n<p>The first talk of the metrology conference on Tuesday was by Andras Vladac of NIST on a topic I am very interested in \u2013 characterizing the non-ideal behavior of scanning electron microscopes.&nbsp; His presentation style was somewhat unique:&nbsp; taking the material from what appeared to be a half-day short course and presenting it in 20 minutes.&nbsp; This is a definitely a talk where viewing and studying it later (thanks to SPIE\u2019s recording) is a must.&nbsp; The other talks in the SEM session were good as well, but more digestible.<\/p>\n\n\n\n<p>Tuesday was packed with customer meetings for me \u2013 a mixed blessing.&nbsp; I missed many good talks, but got to have facetime with people I had not been able to visit for at least two years.&nbsp; I managed to catch the end of Erik Hosler\u2019s plenary talk in the afternoon on \u201cThe path to a useful quantum computer\u201d.&nbsp; One of the more interesting insights was his need to use state-of-the-art immersion lithography for the fabrication of his devices, not for the resolution but for the precision of the manufacturing.&nbsp; For an optical device, feature sizes are in the hundreds of nanometers or microns.&nbsp; But quantum optical devices require on the order of 1 nm line-edge roughness from those features, which definitely pushes state-of-the-art capabilities and makes fabrication quite challenging.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The first talk of the metrology conference on Tuesday was by Andras Vladac of NIST on a topic I am very interested in \u2013 characterizing the non-ideal behavior of scanning electron microscopes.&nbsp; His presentation style was somewhat unique:&nbsp; taking the material from what appeared to be a half-day short course and presenting it in 20 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[6],"class_list":["post-669","post","type-post","status-publish","format-standard","hentry","category-microlithography","tag-spie"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/669","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=669"}],"version-history":[{"count":1,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/669\/revisions"}],"predecessor-version":[{"id":670,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/669\/revisions\/670"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=669"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=669"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=669"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}