{"id":77,"date":"2007-08-01T10:03:01","date_gmt":"2007-08-01T15:03:01","guid":{"rendered":""},"modified":"-0001-11-30T00:00:00","modified_gmt":"-0001-11-30T05:00:00","slug":"","status":"publish","type":"post","link":"https:\/\/lithoguru.com\/life\/?p=77","title":{"rendered":"Who invented pellicles?"},"content":{"rendered":"<p>A question to the lithography blogosphere:  who invented pellicles for photomask protection?<\/p>\n<p>Lithographers have been practicing safe exposures &#8211; with masks wrapped in a thin sheet of plastic to protect them from particles &#8211; since before my time.  What is the first reference to pellicles in the literature?  Who was the first to use them?  The earliest reference that I have found is Ron Hershel, &#8220;Pellicle protection of integrated circuit (IC) masks&#8221;, SPIE Vol. 275 (1981) pp. 23 &#8211; 28.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>A question to the lithography blogosphere: who invented pellicles for photomask protection? Lithographers have been practicing safe exposures &#8211; with masks wrapped in a thin sheet of plastic to protect them from particles &#8211; since before my time. What is the first reference to pellicles in the literature? Who was the first to use them? [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-77","post","type-post","status-publish","format-standard","hentry","category-microlithography"],"_links":{"self":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/77","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=77"}],"version-history":[{"count":0,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=\/wp\/v2\/posts\/77\/revisions"}],"wp:attachment":[{"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=77"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=77"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lithoguru.com\/life\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=77"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}