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A history of microlithography is yet to be written. I am collecting some data for such an effort, and am anxious for help by people with personal experience.
Here is a presentation (PDF) outlining milestones in the development of photolithography tools, organized by company. It's actually more of a tool company history. (Updated on 8-29-2011)
Milestones in Optical Lithography Tool Suppliers
Atsuhiko Kato has developed a great timeline of lithography tool developments as well:
Kato's Timeline of Lithography Tool Development
Here are some good published papers on the topic of semiconductor lithography history (available in PDF format by clicking on the titles):
(Thanks to SPIE, Grant Willson, John Bruning, Mark Schattenburg, and Tomoyuki Matsuyama for allowing me to post these papers here.)
Some essay's I've written on lithography related to history and trends: Essays
Other Resources:
If you have any anecdotes or histories of lithography development in the semiconductor industry that you'd like to share, please email me at chris@lithoguru.com.