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*Lectures recorded in the Fall of 2013 in Austin, Texas *

**Course materials, by class date** for the Fall 2015 semester

(Have all lectures watched, material read, and homework done by the indicated date.)

**Friday, August 28**

Read chapter 1 of the Campbell text

Lecture 1: Semiconductor Overview (18 min) - hardcopy of the slides: Lecture1.pdf

After watching lecture 1, watch the first 5 minutes of Properties of Semiconductors (by Nobel Prize winner Walter Brattain, co-inventor of the transistor)

Optional: Watch William Shatner explain how chips are made in 1976: Microworld (14 min)

Lecture 2: Moore's Law (22 min) - hardcopy of the slides: Lecture2.pdf

Additional reading material for Lecture 2:

G. E. Moore, “Cramming More Components onto Integrated Circuits”, *Electronics*, Vol. 38, No. 8 (Apr. 19, 1965) pp. 114-117.

G. E. Moore, “Progress in Digital Integrated Electronics”, *IEDM Technical Digest* (Washington, D.C.: 1975) pp. 11-13.

**Monday, August 31 **

Lecture 3: Semiconductor Economics (20 min) - hardcopy of the slides: Lecture3.pdf

Additional reading material for Lecture 3:

G. E. Moore, “Lithography and the Future of Moore’s Law”, *Optical/Laser Microlithography VIII, Proc.*, SPIE vol. 2440, pp. 2-17, 1995.

Chris A. Mack, “Fifty Years of Moore’s Law”, *IEEE Transactions On Semiconductor Manufacturing*, Vol. 24, No. 2 (May, 2011) pp. 202-207.

Chris A. Mack, “The Multiple Lives of Moore’s Law", *IEEE Spectrum*, pp. 30-37 (Apr. 2015).

Read chapter 2 of the Campbell text (skip section 2.5)

Lecture 4: Single-Crystal Silicon (14 min) - hardcopy of the slides: Lecture4.pdf

A couple of short (2 and 4 min) video animations of the process for making wafers: http://www.youtube.com/watch?v=LWfCqpJzJYM, http://www.youtube.com/watch?v=AMgQ1-HdElM

**Wednesday, September 2 **

Homework #1: Problems; Solutions

Lecture 5: Doping (20 min) - hardcopy of the slides: Lecture5.pdf

Lecture 6: P-N Junctions (21 min) - hardcopy of the slides: Lecture6.pdf

**Friday, September 4 **

Homework #2: Problems; Solutions; Spreadsheet Data; Spreadsheet Solution

Read chapter 16 of the Campbell text

Lecture 7: The Junction Diode (13 min) - hardcopy of the slides: Lecture7.pdf

Lecture 8: Transistors (21 min) - hardcopy of the slides: Lecture8.pdf

Lecture 9: CMOS Process Flow (13 min) - hardcopy of the slides: Lecture9.pdf

Optional introductory video (a bit dated, but not bad): The Fabrication of Integrated Circuits (11 min)

**Monday, September 7 **

No class - Happy Labor Day!

**Wednesday, September 9 **

Read chapter 4 of the Campbell text (skip sections 4.4, 4.7, 4.8, and 4.10)

Lecture 10: Thermal Oxidation, part 1 (20 min) - hardcopy of the slides: Lecture10.pdf

Lecture 11: Thermal Oxidation, part 2 (19 min) - hardcopy of the slides: Lecture11.pdf

Optional Reading: Deal-Grove 1965 paper

**Friday, September 11**

Lecture 12: Thermal Oxidation, part 3 (35 min) - hardcopy of the slides: Lecture12.pdf

Graphs and Table of Deal-Grove Model Parameters: Deal-Grove_Data_Sheet.pdf

BRIGHAM YOUNG UNIVERSITY: Oxide growth time caculator

**Monday, September 14**

Homework #3 (oxidation): Problems; Solutions

Read chapter 3 of the Campbell text, reread section 4.6

Lecture 13: Diffusion, part 1 (17 min) - hardcopy of the slides: Lecture13.pdf

Review of Fick's Law (if you need it, 12 min): Khan Academy Video

Lecture 14: Diffusion, part 2 (20 min) - hardcopy of the slides: Lecture14.pdf

**Wednesday, September 16**

Lecture 15: Diffusion, part 3 (35 min) - hardcopy of the slides: Lecture15.pdf

**Friday, September 18**

Homework #4 (diffusion): Problems; Solutions

Read chapter 5 of the Campbell text (skip sections 5.2, 5.5, 5.6, and 5.7)

Lecture 16: Ion Implantation, part 1 (20 min) - hardcopy of the slides: Lecture16.pdf

Optional: Applied Materials video, Ion Implantation 101 (13 min)

**Monday, September 21**

Lecture 17: Ion Implantation, part 2 (19 min) - hardcopy of the slides: Lecture17.pdf

Lecture 18: Ion Implantation, part 3 (14 min) - hardcopy of the slides: Lecture18.pdf

**Wednesday, September 23**

Homework #5 (ion implantation): Problems; Solutions

Read chapter 6 of the Campbell text (skip section 6.4)

Lecture 19: Rapid Thermal Processing (26 min) - hardcopy of the slides: Lecture19.pdf

**Friday, September 25**

Read chapter 12 of the Campbell text

Lecture 20: Evaporation, part 1 (15 min) - hardcopy of the slides: Lecture20.pdf

Lecture 21: Evaporation, part 2 (27 min) - hardcopy of the slides: Lecture21.pdf

Georgia Tech e-beam evaporation animation (1.5 min)

**Monday, September 28**

Exam #1 (covers all material through RTP, lecture 19)

Data Sheet for Exam 1 (you will be given this during the exam): Exam1_formulas_data_constants.pdf

Review Material:

Review Questions: Exam1_Review.pdf

Formulas lectures 1-19: Formulas 1-19.pdf (black&white: Formulas 1-19_B&W.pdf)

Practice Exam: Exam1_Practice.pdf

One final video to help you prepare for taking the exam here.

**Wednesday, September 30 **

Lecture 22: Sputtering, part 1 (15 min) - hardcopy of the slides: Lecture22.pdf

Lecture 23: Sputtering, part 2 (24 min) - hardcopy of the slides: Lecture23.pdf

Norfolk State University YouTube video on sputtering (watch first 4.5 minutes, more if you like)

**Friday, October 2 **

Homework #6 (PVD): Problems; Solutions

Read chapter 13 of the Campbell text (skip 13.3, 13.9 and 13.10)

Lecture 24: CVD, part 1 (21 min) - hardcopy of the slides: Lecture24.pdf

Lecture 25: CVD, part 2 (23 min) - hardcopy of the slides: Lecture25.pdf

**Monday, October 5 **

Lecture 26: Deposition Processes (19 min) - hardcopy of the slides: Lecture26.pdf

Optional: animation of atomic layer deposition (2 min)

Read sections 15.1 - 15.3 of the Campbell text

Lecture 27: Device Isolation (19 min) - hardcopy of the slides: Lecture27.pdf

**Wednesday, October 7 **

Homework #7 (CVD): Problems; Solutions

Read sections 15.9 - 15.11 of the Campbell text

Lecture 28: Device Interconnect, part 1 (23 min) - hardcopy of the slides: Lecture28.pdf

Lecture 29: Device Interconnect, part 2 (26 min) - hardcopy of the slides: Lecture29.pdf

**Friday, October 9 **

Read section 11.2 of the Campbell text

Lecture 30: Chemical Mechanical Polishing (CMP) (18 min) - hardcopy of the slides: Lecture30.pdf

Read section 15.10 of the Campbell text

Lecture 31: Copper Dual Damascene (17 min) - hardcopy of the slides: Lecture31.pdf

**Monday, October 12**

Lecture 32: Semi Manufacturing: Yield and Defects (22 min) - hardcopy of the slides: Lecture32.pdf

Lecture 33: Semi Manufacturing: Process Control (18 min) - hardcopy of the slides: Lecture33.pdf

**Wednesday, October 14**

Homework #8 (interconnect and manufacturing): Problems; Solutions

Read chapter 11 of the Campbell text

Lecture 34: Etch, part 1 (18 min) - hardcopy of the slides: Lecture34.pdf

Lecture 35: Etch, part 2 (14 min) - hardcopy of the slides: Lecture35.pdf

**Friday, October 16**

Lecture 36: Etch, part 3 (23 min) - hardcopy of the slides: Lecture36.pdf

Lecture 37: Etch, part 4 (20 min) - hardcopy of the slides: Lecture37.pdf

**Monday, October 19 **

Homework #9 (etch): Problems; Solutions

Read section 7.1 of the Campbell text

Lecture 38: Lithography: Introduction (23 min) - hardcopy of the slides: Lecture38.pdf

Read Semiconductor Lithography (Photolithography) - The Basic Process from my website

Read section 8.6 of the Campbell text

Lecture 39: Lithography: Process Overview (27 min) - hardcopy of the slides: Lecture39.pdf

A couple of 30 - 40 s videos on photoresist spin coating:

https://www.youtube.com/watch?v=3m4WmYObxzY

https://www.youtube.com/watch?v=1iZ5XzF6hEo

**Wednesday, October 21**

Exam #2 (covers all material from evaporation, lecture 20, to etch, lecture 37)

Review Material:

Formulas lectures 20-37: Formulas 20-37.pdf (black&white: Formulas 20-37_B&W.pdf)

Review Questions: Exam2_Review.pdf

Practice Exam: Exam2_Practice.pdf

**Friday, October 23**

Read sections 7.4, and 7.5 of the Campbell text

Lecture 40: Lithography: Imaging Tools (24 min) - hardcopy of the slides: Lecture40.pdf

Additional video: ASML scanner

Read section 7.2 of the Campbell text

Lecture 41: Lithography: Diffraction, part 1 (31 min) - hardcopy of the slides: Lecture41.pdf

A few videos on diffraction by an isolated slit:

Experiment (5 min): https://www.youtube.com/watch?v=AXaZc-VQzWk

Simulation (15 s): https://www.youtube.com/watch?v=uPQMI2q_vPQ

A more detailed set of lectures and animations on diffraction (optional):

http://www.animations.physics.unsw.edu.au/light/diffraction/

**Monday, October 26**

Optional: If you need some extra help on Fourier transforms, here are a couple of videos:

(13 min) http://www.youtube.com/watch?v=1JnayXHhjlg

(9 min) http://www.youtube.com/watch?v=sCCLrSGPmhE

Optional: From the Khan Academy, some very basic topics on Light Waves

Lecture 42: Lithography: Diffraction, part 2 (34 min) - hardcopy of the slides: Lecture42.pdf

Optional: Laboratory Experiment - measure pitch using a laser pointer - Due on Monday, Nov. 2

(Required: read this laser pointer safety sheet if you plan to do the lab)

**Wednesday, October 28**

Homework #10 (litho 1): Problems; Solutions

Read section 7.6 of the Campbell text

One-page handout on Fourier transforms: Fourier Transforms.pdf

Lecture 43: Lithography: Projection Imaging, part 1 (28 min) - hardcopy of the slides: Lecture43.pdf

Lecture 44: Lithography: Projection Imaging, part 2 (19 min) - hardcopy of the slides: Lecture44.pdf

**Friday, October 30**

Lecture 45: Lithography: Illuminating the Mask (37 min) - hardcopy of the slides: Lecture45.pdf

Lecture 46: Lithography: Defocus and DOF (32 min) - hardcopy of the slides: Lecture46.pdf

**Monday, November 2 **

Read section 7.8 of the Campbell text

Lecture 47: Lithography: Standing Waves/Swing Curves (29 min) -hardcopy of the slides: Lecture47.pdf

Lecture 48: Lithography: Resolution and Immersion (20 min) - hardcopy of the slides: Lecture48.pdf

**Wednesday, November 4 **

Homework #11 (litho 2): Problems; Solutions

Read sections 8.1-8.3 and 8.7 of the Campbell text

Lecture 49: Lithography: DNQ Photoresists (25 min) - hardcopy of the slides: Lecture49.pdf

Lecture 50: Lithography: Photoresist ABCs (28 min) - hardcopy of the slides: Lecture50.pdf

**Friday, November 6 **

Read section 8.8 of the Campbell text

Lecture 51: Lithography: CAR, part 1 (21 min) - hardcopy of the slides: Lecture51.pdf

Lecture 52: Lithography: CAR, part 2 (30 min) - hardcopy of the slides: Lecture52.pdf

**Monday, November 9 **

Read section 8.4 of the Campbell text

Lecture 53: Lithography: Development (22 min) - hardcopy of the slides: Lecture53.pdf

Lecture 54: Lithography: Resist Contrast (34 min) - hardcopy of the slides: Lecture54.pdf

**Wednesday, November 11**

Homework #12 (litho 3): Problems; Solutions

Lecture 55: Lithography: Linewidth Control (24 min) - hardcopy of the slides: Lecture55.pdf

Lecture 56: Lithography: Lithographic Quality (25 min) - hardcopy of the slides: Lecture56.pdf

**Friday, November 13**

Lecture 57: Lithography: RET, part 1 (25 min) - hardcopy of the slides: Lecture57.pdf

Lecture 58: Lithography: RET, part 2 (30 min) - hardcopy of the slides: Lecture58.pdf

**Monday, November 16**

Read section 9.7 of the Campbell text

Lecture 59: Lithography: Double Patterning (25 min) - hardcopy of the slides: Lecture59.pdf

Optional: ASML on Double Patterning (5 min) - https://www.youtube.com/watch?v=k062oh-K2zM

Lecture 60: Lithography: Extreme Ultraviolet (21 min) - hardcopy of the slides: Lecture60.pdf

Optional: Cymer video on EUV Sources (7 min) - https://www.youtube.com/watch?v=8xJEs3a-1QU

Optional: Dow video on EUV Resists (5 min) - https://www.youtube.com/watch?v=tTej1bw76bs

**Wednesday, November 18**

Homework #13 (litho 4): Problems; Solutions

Read sections 9.1-9.3 and 9.9 of the Campbell text

Lecture 61: Electron Beam Lithography, part 1 (23 min) - hardcopy of the slides: Lecture61.pdf

Lecture 62: Electron Beam Lithography, part 2 (28 min) - hardcopy of the slides: Lecture62.pdf

Optional: E-beam litho in a research lab (5 min) - https://www.youtube.com/watch?v=25AsHRgBJDM

**Friday, November 20**

Exam #3 (covers all material from lithography intro, lecture 38, to EUV Lithography, lecture 60)

Review Material:

Formulas lectures 38-60: Formulas 38-60.pdf (black&white: Formulas 38-60_B&W.pdf)

Review Questions: Exam3_Review.pdf

Practice Exam: Exam3_Practice.pdf

**Monday, November 23**

Read section 9.11 of the Campbell text

Lecture 63: Nanoimprint Lithography, part 1 (14 min) - hardcopy of the slides: Lecture63.pdf

Lecture 64: Nanoimprint Lithography, part 2 (16 min) - hardcopy of the slides: Lecture64.pdf

**Wednesday, November 25**

Lecture 65: Line-Edge Roughness , part 1 (32 min) - hardcopy of the slides: Lecture65.pdf

**Friday, November 27**

No class - Happy Thanksgiving!

**Monday, November 30**

Lecture 66: Line-Edge Roughness, part 2 (20 min) - hardcopy of the slides: Lecture66.pdf

Lecture 67: Line-Edge Roughness, part 3 (20 min) - hardcopy of the slides: Lecture67.pdf

Optional: Dow video on LER (7 min) - https://www.youtube.com/watch?v=utjk82k6Lrc

**Wednesday, December 2 **

Homework #14 (litho 5): Problems; Solutions

Lecture 68: Directed Self Assembly, part 1 (29 min) - hardcopy of the slides: Lecture68.pdf

Lecture 69: Directed Self Assembly, part 2 (22 min) - hardcopy of the slides: Lecture69.pdf

Optional: Dow video on DSA (5 min) - https://www.youtube.com/watch?v=7Dp6EFyROT4

George Whitesides paper: Self-Assembly at All Scales

**Friday, December 4 **

Last Day of Class!

Additional Review Questions for the Final: Exam4_Review.pdf

The final will be comprehensive, covering all material: Lectures 1 - 69.

Practice Final Exam: Final_Practice.pdf, Solutions: Final_Practice_solutions.pdf

Final exam date and time: TBA.

**Bonus Lectures! **

Here are some additional lectures related to the topic of semiconductor manufacturing. While not an official part of the course, the interested student may enjoy these additional topics.

Bonus Lecture 1: Mask Making, part 1 (33 min) - hardcopy of the slides: Bonus Lecture1.pdf

Bonus Lecture 2: Mask Making, part 2 (25 min) - hardcopy of the slides: Bonus Lecture2.pdf

Bonus Lecture 3: Mask Making, part 3 (21 min) - hardcopy of the slides: Bonus Lecture3.pdf

The lighter side of mask making: having fun at the Bacus conference.

**Working in the semiconductor industry has its
downsides...**