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Lectures recorded in the Fall of 2013 in Austin, Texas
Course materials, by class date for the Fall 2015 semester
(Have all lectures watched, material read, and homework done by the indicated date.)
Friday, August 28
Read chapter 1 of the Campbell text
Lecture 1: Semiconductor Overview (18 min) - hardcopy of the slides: Lecture1.pdf
After watching lecture 1, watch the first 5 minutes of Properties of Semiconductors (by Nobel Prize winner Walter Brattain, co-inventor of the transistor)
Optional: Watch William Shatner explain how chips are made in 1976: Microworld (14 min)
Lecture 2: Moore's Law (22 min) - hardcopy of the slides: Lecture2.pdf
Additional reading material for Lecture 2:
G. E. Moore, “Cramming More Components onto Integrated Circuits”, Electronics, Vol. 38, No. 8 (Apr. 19, 1965) pp. 114-117.
G. E. Moore, “Progress in Digital Integrated Electronics”, IEDM Technical Digest (Washington, D.C.: 1975) pp. 11-13.
Monday, August 31
Lecture 3: Semiconductor Economics (20 min) - hardcopy of the slides: Lecture3.pdf
Additional reading material for Lecture 3:
G. E. Moore, “Lithography and the Future of Moore’s Law”, Optical/Laser Microlithography VIII, Proc., SPIE vol. 2440, pp. 2-17, 1995.
Chris A. Mack, “Fifty Years of Moore’s Law”, IEEE Transactions On Semiconductor Manufacturing, Vol. 24, No. 2 (May, 2011) pp. 202-207.
Chris A. Mack, “The Multiple Lives of Moore’s Law", IEEE Spectrum, pp. 30-37 (Apr. 2015).
Read chapter 2 of the Campbell text (skip section 2.5)
Lecture 4: Single-Crystal Silicon (14 min) - hardcopy of the slides: Lecture4.pdf
A couple of short (2 and 4 min) video animations of the process for making wafers: http://www.youtube.com/watch?v=LWfCqpJzJYM, http://www.youtube.com/watch?v=AMgQ1-HdElM
Wednesday, September 2
Homework #1: Problems; Solutions
Lecture 5: Doping (20 min) - hardcopy of the slides: Lecture5.pdf
Lecture 6: P-N Junctions (21 min) - hardcopy of the slides: Lecture6.pdf
Friday, September 4
Homework #2: Problems; Solutions; Spreadsheet Data; Spreadsheet Solution
Read chapter 16 of the Campbell text
Lecture 7: The Junction Diode (13 min) - hardcopy of the slides: Lecture7.pdf
Lecture 8: Transistors (21 min) - hardcopy of the slides: Lecture8.pdf
Lecture 9: CMOS Process Flow (13 min) - hardcopy of the slides: Lecture9.pdf
Optional introductory video (a bit dated, but not bad): The Fabrication of Integrated Circuits (11 min)
Monday, September 7
No class - Happy Labor Day!
Wednesday, September 9
Read chapter 4 of the Campbell text (skip sections 4.4, 4.7, 4.8, and 4.10)
Lecture 10: Thermal Oxidation, part 1 (20 min) - hardcopy of the slides: Lecture10.pdf
Lecture 11: Thermal Oxidation, part 2 (19 min) - hardcopy of the slides: Lecture11.pdf
Optional Reading: Deal-Grove 1965 paper
Friday, September 11
Lecture 12: Thermal Oxidation, part 3 (35 min) - hardcopy of the slides: Lecture12.pdf
Graphs and Table of Deal-Grove Model Parameters: Deal-Grove_Data_Sheet.pdf
BRIGHAM YOUNG UNIVERSITY: Oxide growth time caculator
Monday, September 14
Homework #3 (oxidation): Problems; Solutions
Read chapter 3 of the Campbell text, reread section 4.6
Lecture 13: Diffusion, part 1 (17 min) - hardcopy of the slides: Lecture13.pdf
Review of Fick's Law (if you need it, 12 min): Khan Academy Video
Lecture 14: Diffusion, part 2 (20 min) - hardcopy of the slides: Lecture14.pdf
Wednesday, September 16
Lecture 15: Diffusion, part 3 (35 min) - hardcopy of the slides: Lecture15.pdf
Friday, September 18
Homework #4 (diffusion): Problems; Solutions
Read chapter 5 of the Campbell text (skip sections 5.2, 5.5, 5.6, and 5.7)
Lecture 16: Ion Implantation, part 1 (20 min) - hardcopy of the slides: Lecture16.pdf
Optional: Applied Materials video, Ion Implantation 101 (13 min)
Monday, September 21
Lecture 17: Ion Implantation, part 2 (19 min) - hardcopy of the slides: Lecture17.pdf
Lecture 18: Ion Implantation, part 3 (14 min) - hardcopy of the slides: Lecture18.pdf
Wednesday, September 23
Homework #5 (ion implantation): Problems; Solutions
Read chapter 6 of the Campbell text (skip section 6.4)
Lecture 19: Rapid Thermal Processing (26 min) - hardcopy of the slides: Lecture19.pdf
Friday, September 25
Read chapter 12 of the Campbell text
Lecture 20: Evaporation, part 1 (15 min) - hardcopy of the slides: Lecture20.pdf
Lecture 21: Evaporation, part 2 (27 min) - hardcopy of the slides: Lecture21.pdf
Georgia Tech e-beam evaporation animation (1.5 min)
Monday, September 28
Exam #1 (covers all material through RTP, lecture 19)
Data Sheet for Exam 1 (you will be given this during the exam): Exam1_formulas_data_constants.pdf
Review Material:
Review Questions: Exam1_Review.pdf
Formulas lectures 1-19: Formulas 1-19.pdf (black&white: Formulas 1-19_B&W.pdf)
Practice Exam: Exam1_Practice.pdf
One final video to help you prepare for taking the exam here.
Wednesday, September 30
Lecture 22: Sputtering, part 1 (15 min) - hardcopy of the slides: Lecture22.pdf
Lecture 23: Sputtering, part 2 (24 min) - hardcopy of the slides: Lecture23.pdf
Norfolk State University YouTube video on sputtering (watch first 4.5 minutes, more if you like)
Friday, October 2
Homework #6 (PVD): Problems; Solutions
Read chapter 13 of the Campbell text (skip 13.3, 13.9 and 13.10)
Lecture 24: CVD, part 1 (21 min) - hardcopy of the slides: Lecture24.pdf
Lecture 25: CVD, part 2 (23 min) - hardcopy of the slides: Lecture25.pdf
Monday, October 5
Lecture 26: Deposition Processes (19 min) - hardcopy of the slides: Lecture26.pdf
Optional: animation of atomic layer deposition (2 min)
Read sections 15.1 - 15.3 of the Campbell text
Lecture 27: Device Isolation (19 min) - hardcopy of the slides: Lecture27.pdf
Wednesday, October 7
Homework #7 (CVD): Problems; Solutions
Read sections 15.9 - 15.11 of the Campbell text
Lecture 28: Device Interconnect, part 1 (23 min) - hardcopy of the slides: Lecture28.pdf
Lecture 29: Device Interconnect, part 2 (26 min) - hardcopy of the slides: Lecture29.pdf
Friday, October 9
Read section 11.2 of the Campbell text
Lecture 30: Chemical Mechanical Polishing (CMP) (18 min) - hardcopy of the slides: Lecture30.pdf
Read section 15.10 of the Campbell text
Lecture 31: Copper Dual Damascene (17 min) - hardcopy of the slides: Lecture31.pdf
Monday, October 12
Lecture 32: Semi Manufacturing: Yield and Defects (22 min) - hardcopy of the slides: Lecture32.pdf
Lecture 33: Semi Manufacturing: Process Control (18 min) - hardcopy of the slides: Lecture33.pdf
Wednesday, October 14
Homework #8 (interconnect and manufacturing): Problems; Solutions
Read chapter 11 of the Campbell text
Lecture 34: Etch, part 1 (18 min) - hardcopy of the slides: Lecture34.pdf
Lecture 35: Etch, part 2 (14 min) - hardcopy of the slides: Lecture35.pdf
Friday, October 16
Lecture 36: Etch, part 3 (23 min) - hardcopy of the slides: Lecture36.pdf
Lecture 37: Etch, part 4 (20 min) - hardcopy of the slides: Lecture37.pdf
Monday, October 19
Homework #9 (etch): Problems; Solutions
Read section 7.1 of the Campbell text
Lecture 38: Lithography: Introduction (23 min) - hardcopy of the slides: Lecture38.pdf
Read Semiconductor Lithography (Photolithography) - The Basic Process from my website
Read section 8.6 of the Campbell text
Lecture 39: Lithography: Process Overview (27 min) - hardcopy of the slides: Lecture39.pdf
A couple of 30 - 40 s videos on photoresist spin coating:
https://www.youtube.com/watch?v=3m4WmYObxzY
https://www.youtube.com/watch?v=1iZ5XzF6hEo
Wednesday, October 21
Exam #2 (covers all material from evaporation, lecture 20, to etch, lecture 37)
Review Material:
Formulas lectures 20-37: Formulas 20-37.pdf (black&white: Formulas 20-37_B&W.pdf)
Review Questions: Exam2_Review.pdf
Practice Exam: Exam2_Practice.pdf
Friday, October 23
Read sections 7.4, and 7.5 of the Campbell text
Lecture 40: Lithography: Imaging Tools (24 min) - hardcopy of the slides: Lecture40.pdf
Additional video: ASML scanner
Read section 7.2 of the Campbell text
Lecture 41: Lithography: Diffraction, part 1 (31 min) - hardcopy of the slides: Lecture41.pdf
A few videos on diffraction by an isolated slit:
Experiment (5 min): https://www.youtube.com/watch?v=AXaZc-VQzWk
Simulation (15 s): https://www.youtube.com/watch?v=uPQMI2q_vPQ
A more detailed set of lectures and animations on diffraction (optional):
http://www.animations.physics.unsw.edu.au/light/diffraction/
Monday, October 26
Optional: If you need some extra help on Fourier transforms, here are a couple of videos:
(13 min) http://www.youtube.com/watch?v=1JnayXHhjlg
(9 min) http://www.youtube.com/watch?v=sCCLrSGPmhE
Optional: From the Khan Academy, some very basic topics on Light Waves
Lecture 42: Lithography: Diffraction, part 2 (34 min) - hardcopy of the slides: Lecture42.pdf
Optional: Laboratory Experiment - measure pitch using a laser pointer - Due on Monday, Nov. 2
(Required: read this laser pointer safety sheet if you plan to do the lab)
Wednesday, October 28
Homework #10 (litho 1): Problems; Solutions
Read section 7.6 of the Campbell text
One-page handout on Fourier transforms: Fourier Transforms.pdf
Lecture 43: Lithography: Projection Imaging, part 1 (28 min) - hardcopy of the slides: Lecture43.pdf
Lecture 44: Lithography: Projection Imaging, part 2 (19 min) - hardcopy of the slides: Lecture44.pdf
Friday, October 30
Lecture 45: Lithography: Illuminating the Mask (37 min) - hardcopy of the slides: Lecture45.pdf
Lecture 46: Lithography: Defocus and DOF (32 min) - hardcopy of the slides: Lecture46.pdf
Monday, November 2
Read section 7.8 of the Campbell text
Lecture 47: Lithography: Standing Waves/Swing Curves (29 min) -hardcopy of the slides: Lecture47.pdf
Lecture 48: Lithography: Resolution and Immersion (20 min) - hardcopy of the slides: Lecture48.pdf
Wednesday, November 4
Homework #11 (litho 2): Problems; Solutions
Read sections 8.1-8.3 and 8.7 of the Campbell text
Lecture 49: Lithography: DNQ Photoresists (25 min) - hardcopy of the slides: Lecture49.pdf
Lecture 50: Lithography: Photoresist ABCs (28 min) - hardcopy of the slides: Lecture50.pdf
Friday, November 6
Read section 8.8 of the Campbell text
Lecture 51: Lithography: CAR, part 1 (21 min) - hardcopy of the slides: Lecture51.pdf
Lecture 52: Lithography: CAR, part 2 (30 min) - hardcopy of the slides: Lecture52.pdf
Monday, November 9
Read section 8.4 of the Campbell text
Lecture 53: Lithography: Development (22 min) - hardcopy of the slides: Lecture53.pdf
Lecture 54: Lithography: Resist Contrast (34 min) - hardcopy of the slides: Lecture54.pdf
Wednesday, November 11
Homework #12 (litho 3): Problems; Solutions
Lecture 55: Lithography: Linewidth Control (24 min) - hardcopy of the slides: Lecture55.pdf
Lecture 56: Lithography: Lithographic Quality (25 min) - hardcopy of the slides: Lecture56.pdf
Friday, November 13
Lecture 57: Lithography: RET, part 1 (25 min) - hardcopy of the slides: Lecture57.pdf
Lecture 58: Lithography: RET, part 2 (30 min) - hardcopy of the slides: Lecture58.pdf
Monday, November 16
Read section 9.7 of the Campbell text
Lecture 59: Lithography: Double Patterning (25 min) - hardcopy of the slides: Lecture59.pdf
Optional: ASML on Double Patterning (5 min) - https://www.youtube.com/watch?v=k062oh-K2zM
Lecture 60: Lithography: Extreme Ultraviolet (21 min) - hardcopy of the slides: Lecture60.pdf
Optional: Cymer video on EUV Sources (7 min) - https://www.youtube.com/watch?v=8xJEs3a-1QU
Optional: Dow video on EUV Resists (5 min) - https://www.youtube.com/watch?v=tTej1bw76bs
Wednesday, November 18
Homework #13 (litho 4): Problems; Solutions
Read sections 9.1-9.3 and 9.9 of the Campbell text
Lecture 61: Electron Beam Lithography, part 1 (23 min) - hardcopy of the slides: Lecture61.pdf
Lecture 62: Electron Beam Lithography, part 2 (28 min) - hardcopy of the slides: Lecture62.pdf
Optional: E-beam litho in a research lab (5 min) - https://www.youtube.com/watch?v=25AsHRgBJDM
Friday, November 20
Exam #3 (covers all material from lithography intro, lecture 38, to EUV Lithography, lecture 60)
Review Material:
Formulas lectures 38-60: Formulas 38-60.pdf (black&white: Formulas 38-60_B&W.pdf)
Review Questions: Exam3_Review.pdf
Practice Exam: Exam3_Practice.pdf
Monday, November 23
Read section 9.11 of the Campbell text
Lecture 63: Nanoimprint Lithography, part 1 (14 min) - hardcopy of the slides: Lecture63.pdf
Lecture 64: Nanoimprint Lithography, part 2 (16 min) - hardcopy of the slides: Lecture64.pdf
Wednesday, November 25
Lecture 65: Line-Edge Roughness , part 1 (32 min) - hardcopy of the slides: Lecture65.pdf
Friday, November 27
No class - Happy Thanksgiving!
Monday, November 30
Lecture 66: Line-Edge Roughness, part 2 (20 min) - hardcopy of the slides: Lecture66.pdf
Lecture 67: Line-Edge Roughness, part 3 (20 min) - hardcopy of the slides: Lecture67.pdf
Optional: Dow video on LER (7 min) - https://www.youtube.com/watch?v=utjk82k6Lrc
Wednesday, December 2
Homework #14 (litho 5): Problems; Solutions
Lecture 68: Directed Self Assembly, part 1 (29 min) - hardcopy of the slides: Lecture68.pdf
Lecture 69: Directed Self Assembly, part 2 (22 min) - hardcopy of the slides: Lecture69.pdf
Optional: Dow video on DSA (5 min) - https://www.youtube.com/watch?v=7Dp6EFyROT4
George Whitesides paper: Self-Assembly at All Scales
Friday, December 4
Last Day of Class!
Additional Review Questions for the Final: Exam4_Review.pdf
The final will be comprehensive, covering all material: Lectures 1 - 69.
Practice Final Exam: Final_Practice.pdf, Solutions: Final_Practice_solutions.pdf
Final exam date and time: TBA.
Bonus Lectures!
Here are some additional lectures related to the topic of semiconductor manufacturing. While not an official part of the course, the interested student may enjoy these additional topics.
Bonus Lecture 1: Mask Making, part 1 (33 min) - hardcopy of the slides: Bonus Lecture1.pdf
Bonus Lecture 2: Mask Making, part 2 (25 min) - hardcopy of the slides: Bonus Lecture2.pdf
Bonus Lecture 3: Mask Making, part 3 (21 min) - hardcopy of the slides: Bonus Lecture3.pdf
The lighter side of mask making: having fun at the Bacus conference.
Working in the semiconductor industry has its downsides...