Attending Microlithography Conferences

In the past 30 years I have attended many, many lithography conferences. Since beginning this web site in 2006, I have started keeping a diary of my experiences at these conferences (with both technical and personal insights from these events). Here are those diaries.

Diary of a Conference Attendee, SPIE Microlithography Symposium 2006

Diary of an Advanced Lithographer, SPIE Advanced Lithography Symposium 2007

Diary of an Advanced Lithographer 2, SPIE Advanced Lithography Symposium 2008

Diary of an Advanced Lithographer 3, SPIE Advanced Lithography Symposium 2009

Diary of an Advanced Lithographer 4, SPIE Advanced Lithography Symposium 2010

Diary of an Advanced Lithographer 5, SPIE Advanced Lithography Symposium 2011

Diary of an Advanced Lithographer 6, SPIE Advanced Lithography Symposium 2012

Diary of an Advanced Lithographer 7, SPIE Advanced Lithography Symposium 2013

Diary of an Advanced Lithographer 8, SPIE Advanced Lithography Symposium 2014

Diary of an Advanced Lithographer 9, SPIE Advanced Lithography Symposium 2015

Diary of an Advanced Lithographer 10, SPIE Advanced Lithography Symposium 2016

Diary of an Advanced Lithographer 11, SPIE Advanced Lithography Symposium 2017

An American Lithographer in Japan, Photomask Japan 2007

Far-out: Attending the 3-Beams Conference, 2008

Aloha From the EUV Islands, EUV Workshop 2008

Tropical Lithography, EUV Workshop 2009

Making Masks in Monterey, BACUS 2009

Lithography in Prague, EUV and Immersion Symposiums 2009

Lithography in Las Vegas, EIPBN, the 3-Beams Conference 2011

Semicon West Lithography Report, Semicon West 2012

Nano in New Zealand, AMN-6, the Advanced Materials and Nanotechnology Conference 2013

Immersed in the Desert, Lithography Workshop 2013

Semicon Again, Semicon West 2016

Captive in Orlando, EIPBN, the 3-Beams Conference 2017

 

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