In the past 25 years I have attended many, many lithography conferences. Since beginning this web page, I have started keeping a diary of my experiences at these conferences (with both technical and personal insights from these events).
Diary of a Conference Attendee, SPIE Microlithography Symposium 2006
Diary of an Advanced Lithographer, SPIE Advanced Lithography Symposium 2007
Diary of an Advanced Lithographer 2, SPIE Advanced Lithography Symposium 2008
An American Lithographer in Japan, Photomask Japan 2007
Far-out: Attending the 3-Beams Conference, 2008
Aloha From the EUV Islands, EUV Workshop 2008