Lithography - A method of producing three-dimensional relief patterns on a substrate (from the Greek lithos, meaning stone, and graphia, meaning to write).
Microlithography - Lithography involving the printing of very small features, typically on the order of micrometers or below in size.
A brief essay on publishing lithography papers:
A Modest Proposal: How to make SPIE Microlithography papers worth listening to (3-20-2006)
New Textbook: Fundamental Principles of Optical Lithography
Some good links to microlithography information:
Training Courses in Lithography by Chris Mack
Chris Mack's Basics of Microlithography Processing
Chris Mack's Glossary of Lithography Terms
History of Microlithography - an ongoing project
Wikipedia - general lithography
PROLITH - Lithography Simulation
PROLITH and the Cartoon Version of Me
The Lighter Side of Microlithography
Diaries of a Lithography Conference Attendee
Here are links to some of my "lithography friends":
Grant Willson, UT Austin, Photoresist Reseach
Mike Watts, Nanoimprint Consultant