Last week we saw the first casualty of the ASML purchase of Cymer. Ushio has announced that it is closing down its XTREME subsidiary in Germany. Now it is just Cymer and Gigaphoton still standing, hoping that they can make enough EUV photons to support at least one of them.

From the Ushio press release of May 9:

USHIO INC. today announced that it will close down the activities of XTREME technologies GmbH, a research and development company for Extreme Ultraviolet (EUV) light sources for next-generation semiconductor lithography, and consolidate the EUV light source business into a single unit in Japan and continue it for inspection and development applications in the future.

With this, the maintenance services for XTREME EUV light sources that were provided for ASML Netherlands B.V., a subsidiary of Netherland-based ASML Holding N.V., are transferred to ASML on May 9, local time.