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 - | Scientist
 
Chris Mack has published several books and book chapters, writes several magazine columns, and has over 170 technical papers in the field of lithography:
Textbook: Fundamental Principles of Optical Lithography
Technical papers (a complete list)
Chris's Favorites (downloadable)
Chris's Recent Papers (downloadable)
Chris's Papers on LER (downloadable)
The Lithography Tutor (downloadable)