New web item – my recent lithography papers

I’ve just added a new page to my web site under Published Works called Chris’s Recent Papers. The goal is to put the last few papers I’ve written here for easy access (as links to the papers or PDFs to download). If I keep writting these kinds of papers, the list should change frequently. Here is what is up there now:

What’s So Hard About Lithography?
Accuracy, speed, new physical phenomena: The future of litho simulation
Methods for Benchmarking Photolithography Simulators: Part IV
Fast lithography simulation under focus variations for OPC and layout optimizations
From Data to Decisions

One thought on “New web item – my recent lithography papers”

  1. Chris,
    Thanks for the articles!!

    Looks like you have been spammed, maybe some word verification is in order. Great site, thanks for sharing and indulging yourself.


Leave a Reply

Your email address will not be published. Required fields are marked *