Those who can’t do, teach. I’ve never liked that old saying, mostly because I like to teach (and flatter myself that I’m pretty good at it). I’m teaching now at Notre Dame, but am also immersed in finishing my textbook, Fundamental Principles of Optical Lithography. I guess a corollary to that old saying might be “those who can’t do, write.” I guess I don’t like that saying much either, but a slightly changed version is most certainly true: “Those who write can’t do.” I can attest to the truth of this statement for one simple reason – writing a book is all consuming. If you really pour yourself into writing, you just don’t have anything much left over to do anything. At least that is the way it is for me. I hope to be finished by the end of the year (already 5 months past my deadline!), so until then I doubt I will get much done, including all the interesting articles I am planning for my web page. Ah well.
BTW, for all the lithographers out there who are reading this, what do you want most out of a lithography textbook? Give me a shout.
Chris
I’d love to see a section with more details on how these full-chip lithography simulators trade-off accuracy vs. speed as well as an introduction to the whole OPC/RET flow.
Just ran into your blog; very cool.
very very very cool!
i want to see your paper about 1980-1990 years .i think it very suitable to me .
Chris,
Since the processing and chemistry is tied very closely to the physics of lithography (you can’t talk about one without at least alluding to the others), it would be nice to see guidelines on how to develop a lithography process. What to look at first, what to watch for, the proper interpretation of metrology, etc.
Looks like we’re still not safe from Spam either