It is 10 days since the SPIE Advanced Lithography Symposium, and I have finally finished and submitted all my papers! If you are interested in any of them, you can find them on the Fractilia website here:
Note that for the tutorial talk I gave I will not be preparing a paper, but you can get a copy of the slides I presented. And for those you who didn’t attend the talk, this is the way it ended:
One thought on “SPIE Advanced Lithography Symposium Postscript”
Thank you for posting the papers! Will you also be posting the manuscript/slides for “Line-edge roughness (LER) performance targets for EUV lithography” ?