Warren D. Grobman, 1942 – 2008

Warren and his wife April were good friends of Susan and I. He will be greatly missed.

Dr. Warren D. Grobman, who died on Wednesday July 9, 2008, had a distinguished career as an x-ray spectroscopist and a semiconductor physicist. He was born in Philadelphia, Pennsylvania in 1942, received his undergraduate degree from the University of Pennsylvania in 1964, and his PhD from Princeton University in 1967. He worked for many years at the IBM Thomas J. Watson Research Center in New York, notably as the founder of the x-ray lithography program, before relocating with his wife, April to Texas where he worked at SEMATECH and Motorola Semiconductor. He made many contributions, both as a research scientist and in product development and design, and was a fellow of both the American Physical Society and of IEEE. He also found time to pursue his love of admiring and creating art. He was thoroughly enjoying his retirement with his beloved wife, April, traveling, music, food and wine, computers, and time with the rest of their family, along with expanding his work as an artist. Warren had a rare combination of a keen intellect and an irreverent sense of humor and fun, coupled with a gift for caring, working with and teaching others. He was as likely to be taking a reflective walk with April, building a computer or a robot just for fun, admiring or creating art, studying physics lectors and following the progress of the Large Hadron Collider or sitting on the floor playing and giggling with his grandchildren. He leaves a legacy to his family and friends of love and caring for others and of love of knowledge, enjoyment of life, honesty, integrity and hard work. He was a wonderful husband, father; grandfather, brother, uncle and friend.

He is survived by his loving wife, April Schweighart; sons and daughters-in-law, Jeffrey and Norma Grobman and Steven and Ashlyn Grobman; grandchildren, Tyler and Lauren Grobman; sister and niece, Rita Grobman Howard and Rachel Howard; brother-in-law and sister-in-law, Charles and Cindy Schweighart and their daughters, Allison and Elizabeth Schweighart; and father-in-law, Ed Schweighart.

Inconspicuous Consumption

I just ran across a random tidbit of information that got me thinking. Proctor and Gamble has a product called FreBreze. People spray this chemical around their house to make it seem as if a fresh breeze had been blowing through (because, of course, we would never want to actually open our windows). This is a product that absolutely no one needs. It’s sold in the classic way – through massive advertising guided by people with PhDs in psychology. So here is the tidbit: annual sales of FreBreze were greater than $800M last year. Here is some perspective: according the World Bank, there are twenty countries with 2007 GDPs less than this amount. This is what I call inconspicuous consumption – the little things we spend our money on that we hardly notice – and if we didn’t spend it, we would hardly notice that, too.

My Infant Scientist

Yesterday, my 10 month old daughter became an “infant scientist”. At least, that what they called her at the University of Texas Infant Cognition Laboratory. In fact, she was the subject of an experiment (though I refuse the lab rat comparison). We volunteered Anna for the test, which took about 45 minutes, just as we had volunteered her older sister Sarah for a different experiment two years ago. The experiment was quite interesting. Anna was outfitted with an electrode-laden cap so that brain activity could be monitored. Then she was shown pictures of female faces of varying degrees of beauty (the faces had been rated for their attractiveness earlier by adults). The question was, is the baby brain hardwired to recognize beauty? Anna’s left brain definitely lit up more when pretty faces were shown to her. Interesting.

Anna Mack, Infant Scientist

Expert Windage

I’ve been doing some work lately as an expert witness, so I found the following factoid quite interesting. The most commonly quoted song lyric in judicial opinions is from Bob Dylan’s Subterranean Homesick Blues: “You don’t need a weatherman to know which way the wind blows.” How do I know this? The law professor Alex B. Long is described as the leading expert on music citations in judicial opinions, and his analysis can be found in an article in yesterday’s New York Times. Couple this with Arthur C. Clarke’s fourth law (“For every expert there is an equal and opposite expert”) and we see that, especially in a court of law, two expert weathermen will generally tell you the wind is blowing in opposite directions.

Clarke’s Laws and Future Lithographies

The recent death of the great science fiction writer Arthur C. Clarke prompted me to recall his famous three “laws” (from the 1973 edition of his book of essays Profiles of the Future):

1. When a distinguished but elderly scientist states that something is possible, he is almost certainly right. When he states that something is impossible, he is very probably wrong.
2. The only way of discovering the limits of the possible is to venture a little way past them into the impossible.
3. Any sufficiently advanced technology is indistinguishable from magic.

The last law is a favorite in a world where very few of us have even the slightest idea how most of our essential gadgets work. But the first two laws I think are more interesting, and revealing.

In particular, the first law hits close to home for me. First, let us be clear what Clarke meant. He defined “elderly” in this context as any scientist over 30, or possibly 40 in some cases. Thus, I easily qualify as an elderly scientist, and some (who don’t quite know me well enough) might even regard me as distinguished. So I began to think about past pronouncements I’ve made as to what is “impossible” in the field of lithography. The most obvious category is next generation lithographies, where I have made many public statements of the kind “193 nm lithography forever” and “EUV will never work”. Could it be that I am a classic example of Clarke’s first law, and that I am “very probably wrong”?

I don’t think so. Let me explain why. First, I don’t think that EUV lithography is impossible. In fact, I am quite confident that the many smart people working on that technology will be able to demonstrate very high resolution with EUV and be able produce working high-end chips in the very near future. EUV lithography is not impossible, it is just uneconomical. Tool costs coupled with throughput (not to mention defects) will render EUV lithography fundamentally too expensive. The technology is certainly feasible, but the economic realities of semiconductor manufacturing are even more harsh than the realities of the limits of physics. The important question to our industry is not “Can you do it?”, but “Can you do it for a dollar?” EUV can’t, and in my expert opinion never will.

By the way, in 1999 Clarke added a fourth law: “For every expert there is an equal and opposite expert.” Keep that in mind when pondering my expert opinions on the fate of EUV lithography.

Aloha From the EUV Islands

Last week I attended the 2008 International Workshop on EUV Lithography on Maui. Many people who know me are perfectly aware of my opinions on EUV lithography (a doomed technology), and thus may wonder why I was attending an EUV workshop. Did I mention it was on Maui?

Actually, my current primary research interest is line-edge roughness (most likely the ultimate limiter of resolution for optical lithography), a topic of great interest to the EUV community (since it is killing them). I gave a talk at the workshop and presented a full-day course on line-edge roughness the day before the workshop began. And I had some very useful discussions on the topic with various other attendees – that’s the point of a workshop, is it not? I also got the chance to tell everyone during a panel discussion that EUV would never make it to high volume manufacturing (I have a habit of stating the obvious, even if no one else does). All in all, great fun.

The workshop was organized by Vivek Bakshi, who was recently “redeployed” (laid-off) by SEMATECH, along with all the other SEMATECH lithographers in Austin who couldn’t stomach a move to Albany, NY. Since SEMATECH’s main product is workshops, it is not surprising that one of their excess minions would start up a business (Vivek has called his EUV Litho, Inc.) to compete. SEMATECH was not amused. They made it very clear that all suppliers receiving SEMATECH money would not participate in this renegade conference. As such, the meeting became more academic and international, with virtually none of the “we’re on track, trust us” talks that the tool vendors always give at similar SEMATECH meetings. And besides, it was on Maui.

And I still am. That’s why this post is almost a week late. I’ve acclimated to island time – what’s the hurry? I brought my wife and two daughters, as well as my parents, who celebrated their 50th wedding anniversary on Sunday. Life is good. In fact, I am now sitting on the balcony of my room overlooking the ocean drinking a coconut porter from Maui Brewing Company. From a can. Life is good, but not perfect.

Lithography Word Recount

I was befuddled (rank: 53,829) by my recent experience with wordcount.org (see my previous post). It seems that the word ‘lithography’ is ranked appallingly low in frequency of use, relegating me and my life’s work to the denizens of the perennially unpopular. But something smelled funny. I began to think that WordCount was not very good at counting. Since I have spent a lot of time thinking about how to measure things over the years, I decided to do what I always do when I see a data point I don’t like: blame the measurement.

I began by looking into the website’s counting method. From the wordcount.org site:

“WordCount™ is an artistic experiment in the way we use language. It presents the 86,800 most frequently used English words, ranked in order of commonness… WordCount data currently comes from the British National Corpus, a 100 million word collection of samples of written and spoken language from a wide range of sources, designed to represent an accurate cross-section of current English usage.”

So WordCount is an art project. I suppose that doesn’t mean it couldn’t be accurate, though I suspect that accuracy is low on the list of success criteria for most artists. But what is the British National Corpus? I found the official BNC website, and this is what they said:

“The British National Corpus (BNC) is a 100 million word collection of samples of written and spoken language from a wide range of sources, designed to represent a wide cross-section of current British English, both spoken and written.”

British English! That explains a lot. I thought the word count would relate to real English. But since lithography was a European invention, and was certainly practiced in England, I’m not sure that this could explain lithography’s unexpected lack of popularity. True, England doesn’t have a semiconductor industry to speak of, so talk of semiconductor lithography over dinner is probably unlikely. But still, the frequency of use seemed too low, especially compared to ‘sciorto’.

I did a little more digging. Of the 100 million words in the collection, the word ‘lithography’ is used 47 times. That’s a pretty small count, even if the sample appears to be large. 100 million words is obviously not enough if you want good statistics at the tail of the distribution. The other words near ‘lithography’ on the list – luqa, calculi, tiverton, kaysone, sciorto, and bullingdon – were all tied with lithography. Digging further in the BNC website, I could even find the sources for those 47 word uses. This is where the fun begins.

Yes, Sciorto is an Italian family name, but Count Roman di Sciorto is a character from a romance novel called Calypso’s Island, the source of all 47 occurrences in the BNC. Talk about skewing the sample. Here is one example: “How ludicrous, after all, to have imagined that the great Count Romano de Sciorto, of Casa Sciorto, of the Città Notabile, the Noble City, could fall seriously in love with her.” Riveting. Tiverton, while certainly a city in England, is also a character from another romance novel, Hidden Flame, from which 19 of its 47 word-use references came. It seems that romance novels make up a fair part of the 100 million word collection. Almost every use of Bullingdon occurred on television news and refered to the prison of that name in Oxfordshire, England. What we have here is a phenomenon called ‘the sampling sucks’, caused by the lumpiness of an abysmally low sample size for these words. 100 million words seems large, but when you think about all of the words that are written and spoken in English each day, that number starts looking very small.

The bottom line is this: WordCount is art, and while it definitely has words, it doesn’t do a very good job of counting. You shouldn’t expect artists to count – that’s what nerds are for.

By the way, ‘recount’ is number 29,409 on the list. I think the wordcount.org folks need to move it a little higher up.

Lithography Word Count

II discovered an interesting website recently: wordcount.org. The site claims to have taken the 86,800 most common words in the English language and ordered them by frequency of use. It’s no surprise that the top ten words are, in order, ‘the’, ‘of’, ‘and’, ‘to’, ‘a’, ‘in’, ‘that’, ‘it’, ‘is’, ‘was’. Overcome by curiosity, I began typing in words to see how they ranked. ‘Mack’ is number 26,453. ‘Beer’ is 2,927. ‘Wine’ is more common at 1,634 (though I would have thought beer, the common man’s drink, would be more popular).

Then I typed in ‘lithography’ (the subject of my profession). I was shocked at the result: #42,832. There are 42,831 words in English that are more commonly used than ‘lithography’! Obviously, that is not true in my household, but could I be so out of touch with the rest of the world that I didn’t realize that lithography is in the bottom half of word popularity?

I decided to look at the few words just above ‘lithography’ on the list. Here they are.

42,826 luqa
42,827 calculi
42,828 tiverton
42,829 kaysone
42,830 sciorto
42,831 bullingdon
42,832 lithography

Are they kidding me? A word with a ‘q’ not followed by a ‘u’ is more popular than ‘lithography’? The only word I even remotely recognize from this list is the plural of calculus, and I can truthfully say that I believe that one calculus is enough. Is my field of study and work, the field that I have devoted the last 25 years of my life to, really this obscure? I guess so.

By the way, Luqa is a small village in Malta. Tiverton is an English town in Devon (as well as a New English town in Rhode Island). Kaysone is the first name of Kaysone Phomvihane, a former prime minister of Loas. Sciorto is an Italian family name. Bullingdon is an area of land in Oxfordshire, England, known as a “hundred”. The Bullingdon Club (or Bullingdon Dining Club) is a top-secret Oxford student drinking club for the super-rich. (Thank you, Google.) I look forward to using these words in conversation soon. I suspect there are a lot of words above ‘lithography’ on the list that I’ll need to learn.

But wait, there is more on this subject that must be told. Could there have been a measurement error? Stay tuned…

The 3-Beams Conference, day 2

Day 2 of the 3-beams conference saw many more good papers (and one exceptionally bad one – the other people in the room know which one I am talking about). I was especially fascinated with the work on metamaterials that can produce a negative refractive index. Such materials, which have been demonstrated in the past in the microwave regime, tax the scientific imagination and have led to many popular claims such as the possibility of making planar “superlenses”, invisibility cloaks, and other such sci-fi oddities. Unfortunately, it seems that the definition of what it takes to show negative refraction is slowly expanding to encompass phenomena that, while admittedly very interesting, might best be explained in another way.

Ivan Lalovic of Cymer gave a god paper on the influence of speckle on line edge roughness – a topic that needs attention. I also saw some papers on molecular glass resists, and I become more skeptical of this class of materials each time I hear about them.

At the end of the day, we all loaded up into buses and went to the Portland Zoo for the conference banquet. We were quite fortunate with regards to wind direction, otherwise appetizers and cocktails next to the elephant pens could have been very unpleasant. The dinner ended with the 14th annual micrograph contest – a fascinating blend of science and art. Past years’ winners can be found at www.zyvexlabs.com/EIPBNuG/uGraph.html, and this years winners will be posted soon. These pictures definitely confirm the site’s slogan that “A good Micrograph is worth more than the MegaByte it consumes.”

The 3-Beams Conference

Greetings from the 3-beams conference, in drizzly Portland, Oregon. The official title is the 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), but for obvious reasons it is more commonly referred to as the three-beam or triple-beam conference. This conference is not strictly about lithography, but it has a strong lithography component (maybe 50%), so it is definitely within my bailiwick.

Unlike the SPIE Advanced Lithography conference, which I have posted frequently about in the past, the 3-beams conference is research-oriented. There is far more participation from universities than from industry. And while less of the papers here are likely to be immediately relevant to my work, I enjoy stretching the boundaries of what I know by hearing about the far-out stuff people are doing (how about this for a paper title: Eigen Mode Analysis of Plasmon Resonances in Nanoparticles). I always come away from this conference inspired in an unexpected way.

As one would expect, attendance here is much smaller than the mighty SPIE Advanced Lithography conference – somewhere around 500 people I think. The plenary session had a great talk on possible ways to achieve higher efficiencies in solar cells using quantum dot arrays, and another that used “lithography” to move around individual atoms to build a very, very small transistors (overlay turned out to be a big problem). The afternoon session on line edge roughness was very good, since that is my current problem of interest.

I had a poster in the evening, and that’s when things got ugly. The various organizers of this conference have threatened for years to shove me off into a dark corner, but this year they actually did it. My poster was in such a cramped space that only one person at a time could get back there to look at it, and even then they couldn’t see it because of a lack of light (a statement, no doubt, that one of the three beams is less important to the powers that be than the others). If my poster had been any good and thus worth seeing, I would have been upset. But still, having stayed up far too late the night before to try to finish it, I would have enjoyed at least being able to see the finished product.

I consoled my not-very-bruised ego by going out to dinner and having some great Portland microbrew beer and seafood. It doesn’t take much to put me in a good mood.

Coming up next: more papers, and the conference banquet at the Portland Zoo.

Musings of a Gentleman Scientist