The Japan Prize has released some videos of Grant Willson and Jean Frechet recieving the Japan Prize.
The award ceremony:
http://www.youtube.com/watch?feature=player_embedded&v=ksGG1DAXe9M
A Japanese-language life story of Drs. Willson and Frechet, with a review of photolithography and chemically amplified resists:
http://www.youtube.com/watch?v=zDfTaFeOLuM
The winners’ commemorative lectures:
Thanks for the link – great talks! – what’s interesting about ’em is that when things looked impossible for DUV Lithography they came up with a solution (helped by the development of Excimer lasers). They were too late, but fortunately I-line filled the gap.
Now we are in a similar position with EUV and there are glimpses of new (non-chemically-amplified?) resists and more powerful sources – it will be interesting to look back in 25 years when we know what happened (I hope I am still around).